2021 China New Design Micrometer Adjustable Cylinder Hone - High precision Laser perforation for glass and plastic – FOREST

Features:

1. High-power and high-stable UV laser is used to directly ablate the vaporized material, with a μm-level heat-affected zone and a minimum processing spot of 5μm.

2. The beam shift is controlled at high speed and high precision by the precision galvanometer to realize high-speed precision etching of small format.

3. The precise positioning and processing of high-precision micro-holes is realized by the translation of the high-precision translation stage;

4. The Z-axis is electrically adjustable for precise focusing to meet the processing requirements of materials with different thicknesses.

5. The high-precision focusing of the rangefinder high-resolution industrial camera ensures the long-term stability and accuracy of the system.

6. The system adopts marble countertops to improve the overall stability of the system, and all mechanical components are carefully selected to ensure long-term accuracy.

7. It can be used to process metals, ceramics, organics, glass and other materials to achieve etching, blind holes, through holes, slotting, cutting, etc.

8. The minimum processing line width is less than 5μm.

Application range:

Semiconductor flexible circuit board cutting, ITO film etching, microelectronic device manufacturing, printing template preparation, biochip preparation, precision micro

Mold forming

Items	Parameter	FM-UVD5	FM-UVSD5	FM-UPVD12
Laser	wave	355nm	355nm	355nm
	Power	5W@30kHz	5W@30kHz	12W@100kHz
	modulating frequency	1~200kHz	1~200kHz	1~2000kHz
	Pulse width	20ns@30kHz	20ns@30kHz	7ns@100kHz
	beam quality	＜1.3	＜1.3	＜1.3
Galvo	Scan area	＜50*50mm	＜50*50mm	＜50*50mm
	Repeatability accuracy	＜1um	＜1um	＜1um
	Scan speed	≤3m/s	≤3m/s	≤3m/s
	Positioning speed	≤6m/s	≤6m/s	≤6m/s
X Y tables	Travel	–	300*300mm	300*300mm
	Repeatability accuracy	–	≤±5um	≤±1um
	Positioning accuracy	–	≤±25um	≤±3um
Z axis	Travel	50mm	50mm	50mm
	Repeatability accuracy	≤±3um	≤±3um	≤±3um
	Positioning accuracy	≤±15um	≤±15um	≤±15um
CCD monitoring positioning	Camera	five-megapixel	five-megapixel	five-megapixel
	Optical magnification	8X	8X	8X
Processing	Minimum spot	5um	5um	5um
	Hole processing accuracy	±5um	±5um	±5um
	Repeatability accuracy	≤±2um	≤±2um	≤±2um
	Available materials for procesing	Glass metal , 有机物等
Application	Pipe bottle	ok	good	good
	die bottle	ok	good	good
	Plastic bottle	not good	ok	good
	Soft bags	No available	ok	good
Coolant system	Water coolant (1500W cooling capacity )
Power supply	220V, 50~60HZ, 1 phase or customized
Measure(mm)	1500*1000*1800			1600*1300*1800
Weight(KG)	1500			2000
Microscopic measurement finishing of processed samples

Note: Constant temperature (25±0.5℃), obtained after preheating for 30 minutes