Igwe ihe eji eme ihe nke micropore laser maka semiconductor

Opekempe nhazi micropore dayameta bụ 5μm, n'ozuzu nhazi nhazi bụ ± 4μm, njirimara mpaghara bụ ihe na-erughị 3μm, na obosara nhazi bụ 300 * 300mm..

A na-eji ya eme ihe maka: nrụpụta ngwaọrụ microelectronic, nkwadebe ndebiri mbipụta, nkwadebe biochip, ịkpụzi nkenke, imepụta akụkụ nke ngwa ngwa

1. Iji ike dị elu na nke dị elu UV laser iji kpochapụ ihe gasification ozugbo, na-eji oghere nhazi ọkwa μm na mpaghara okpomọkụ na-emetụta μm;

2. Ọsọ ọsọ dị elu na nkenke nkenke nke nkwụsị nke beam site na galvanometers ziri ezi na-ebubata iji nweta ngwa ngwa dị elu nke obere nhazi obere oghere;

3. A na-enweta nhazi ngwa ngwa dị elu na nkenke nke ọma site na nsụgharị nke micron-level high-speed linear motor platform;

4. Z-axis bụ eletriki na-agbanwe agbanwe iji mee ka ihe dị iche iche dị iche iche na-eme ka ọ dị iche iche na izute ihe achọrọ nhazi oghere nke taper;

5. The nso axis ibu-mkpebi ụlọ ọrụ igwefoto na-eji maka zuru-frame njehie mgbazi nke galvanometer, ultra-elu-nkenke na-elekwasị anya, na online nha iji hụ na ogologo oge kwụsie ike na izi ezi nke usoro;

6. Usoro ahụ na-eme ka ihe ndị na-emepụta nkume mabụl na-eme ka ọ dịkwuo mma n'ozuzu nkwụsi ike nke usoro ahụ, a na-ejikwa nlezianya họrọ ihe niile eji arụ ọrụ iji hụ na ogologo oge ziri ezi;

7. The kacha nta nhazi micropore dayameta bụ 5μm, n'ozuzu nhazi ziri ezi bụ ± 4μm, obodo ziri ezi bụ ihe na-erughị 3μm, na nhazi obosara bụ 300 * 300mm;

8. A na-eji ya maka micromachining ziri ezi nke ọla, ceramics, silicon wafers, iko, organics na ihe ndị ọzọ, dị ka nhazi micro-hole na nkenke ịkpụ.

E jiri ya tụnyere EDM micro-hole nhazi, igwe mkpọpu ihe, kemịkalụ corrosion, n'ibu ọkpọ, wdg, laser nkenke micro-hole machining nwere uru ndị a:

Ọsọ dị elu (ihe ruru oghere 4000 kwa nkeji)

Nke kacha mma (<3μm)

Enweghị ihe mgbochi ihe (ọla, ceramik, silicon wafers, organics, wdg)

Usoro oghere mmemme (opekempe 5μm, oghere taper akọwapụtara)

Enwere ike ịhazi nkesa (obosara nhazi 300mm * 300mm), enweghị ebu na nkpuchi chọrọ.

Enweghị mmetọ na enweghị ihe oriri

nhazi ozugbo

Cheta na: okpomọkụ mgbe niile (25 ± 0.5 ℃), nwetara mgbe preheating maka 30 nkeji