Micropore Laser Perforation Machine ye semiconductor
Iyo shoma yekugadzirisa micropore dhayamita ndeye 5μm, iyo yakazara kugadzirisa iko ± 4μm, iyo yemuno chimiro chechokwadi isingasviki 3μm, uye hupamhi hwekugadzirisa i300 * 300mm..
Inonyanya kushandiswa ku: microelectronic device kugadzira, kudhinda template kugadzirira, biochip kugadzirira, kunyatsoita mold kuumba, instrumentation precision zvikamu kugadzira.
1. Kushandisa high-simba uye yakakwirira-kugadzikana UV laser kuti abvise zvakananga gasification zvinhu, ine μm-level processing aperture uye μm-level-inopisa-inopisa nzvimbo;
2. High-speed uye yakakwirira-chaiyo kudzora kwedanda kutsauswa kuburikidza kune kunze kwenyika chaiyo galvanometers kuti iwane yakakwirira-yekukurumidza diki-format chaiyo micro-gomba processing;
3. High-speed uye high-precision yakakura-format micro-hole processing inowanikwa nekushandurwa kwe micron-level high-speed linear motor platform;
4. Iyo Z-axis inogadziriswa nemagetsi kuti ienderane nemidziyo yehukobvu hwakasiyana uye kusangana nechaiyo taper hole kugadzirisa zvinodiwa;
5. Iyo yakawanda axis super-resolution industry kamera inoshandiswa pakugadzirisa-furemu kukanganisa kukanganisa kwegalvanometer, ultra-high-precision focusing, uye chiyero chepaIndaneti kuti ive nechokwadi chekugadzikana kwenguva refu uye kururamisa kwegadziriro;
6. Iyo sisitimu inotora marble countertops kuti ivandudze kugadzikana kwese kwehurongwa, uye ese ma mechanical components anonyatsosarudzwa kuti ave nechokwadi chenguva refu yakarurama;
7. Iyo shoma yekugadzirisa micropore dhayamita ndeye 5μm, iyo yose yekugadzirisa kunyatsoita ndeye ± 4μm, iyo yemunharaunda chimiro chakarurama iri pasi pe3μm, uye hupamhi hwekugadzirisa huri 300 * 300mm;
8. Inoshandiswa kunyatsogadzirisa micromachining yesimbi, ceramics, silicon wafers, girazi, organics nezvimwe zvinhu, zvakadai se micro-hole processing uye kunyatsocheka.
Kuenzaniswa neEDM micro-hole processing, mechanical drilling, chemical corrosion, mechanical punching, etc., laser precision micro-hole machining ine zvinotevera zvakanakira:
High kumhanya (kusvika 4000 maburi pasekondi)
Kurongeka kwepamusoro (<3μm)
Hapana zvinorambidzwa (simbi, ceramics, silicon wafers, organics, nezvimwewo)
Programmable gomba pateni (zvishoma 5μm, chaiyo taper gomba)
Kugovera kunogona kugadzirwa (kugadzirisa hupamhi 300mm * 300mm), hapana mold uye mask inodiwa.
Hapana kusvibiswa uye hapana zvinodyiwa
zvakananga kugadzirisa
Items | Parameter | FM-UVM3A | FM-UVM3B |
Laser | wave | 355nm | |
Simba | >3W@40kHz (3-40W sarudzo) | ||
modulating frequency | 1 ~ 200kHz | ||
Pulse width | 15ns@40kHz | ||
beam quality | <1.2 | ||
Galvo | Scan nzvimbo | <50*50mm | <15*15mm |
Kudzokorora kwakarurama | <1um | ||
Positioning kururama | ≤±3um | ||
XY matafura | Travel | 300 * 300mm (600 * 600mm zvingasarudzwa) | |
Positioning resolution | 0.1um | ||
Kudzokorora kwakarurama | ≤±1um | ||
Positioning kururama | ≤±3um | ||
Acceleration | ≤1G | ||
Speed | ≤200mm/s | ||
Z axis | Travel | 150mm | |
Kudzokorora kwakarurama | ≤±3um | ||
Positioning kururama | ≤±5um | ||
CCD monitoring positioning | Kamera | mashanu-megapixel | |
Optical magnification | 10X | ||
kupatsanurwa kwedunhu | kururama | ±3μm | |
Processing | Minimum nzvimbo | 8um | 5um |
Hole kugadzirisa kururama | ±5um | ||
Kudzokorora kwakarurama | ≤±1um | ||
Zvishandiso zviripo zvekugadzirisa | Girazi, organics, simbi, ceramics, nezvimwe. | ||
GGGGA application | Pombi bhodhoro | ok | kugona |
kufa bhodhoro | ok | kugona | |
Bhodhoro repurasitiki | hazvina kunaka | ok | |
Mabhegi akapfava | Hapana zviripo | ok | |
Inotonhorera system | Mvura inotonhorera (1500W kutonhora simba) | ||
Magetsi | 220V, 50 ~ 60HZ, 1 chikamu kana customized | ||
Simba | ≤2000W | ||
Kuyera(mm) | 1200*1200*1900mm | ||
Huremu (KG) | 1200Kg |
Cherechedza: Tembiricha yenguva dzose (25±0.5 ℃), inowanikwa mushure mekupisa kwemaminetsi makumi matatu