Micropore Laser Perforation Machine mo te semiconductor
Ko te iti rawa o te tukatuka micropore diameter he 5μm, ko te tika o te tukatuka katoa ko ± 4μm, ko te tika o te waahanga o te rohe he iti iho i te 3μm, me te whanui tukatuka ko 300 * 300mm..
Ka whakamahia te nuinga mo: te hanga taputapu microelectronic, te whakarite tauira taaira, te whakarite biochip, te hanga maaka tika, te hanga taputapu taputapu taputapu.
1. Ma te whakamahi i te laser UV kaha-nui me te pumau-nui ki te whakakore tika i nga mea whakaahuru, me te waahi tukatuka taumata μm me te rohe μm-taumata kua pa ki te wera;
2. Te tere-tere me te tino tika te whakahaere o te kurupae kurupae na roto i nga galvanometers kawemai ki te whakatutuki i te tere-tere-iti-whakaahua tika te tukatuka moroiti-poka;
3. Ko te tere-tere me te tino-nui te tukatuka moroiti-poka nui-nui ka kitea e te whakamaoritanga o te papaarangi motika teitei-tere teitei-micron;
4. Ko te Z-axis he hiko te whakarite ki te urutau ki nga rauemi o nga momo matotoru me te whakatutuki i nga whakaritenga tukatuka poka taper motuhake;
5. Ka whakamahia te kamera awheawhe super-resolution mo te whakatikatika hapa anga-katoa o te galvanometer, ultra-high-precision arotahi, me te ine ipurangi hei whakarite i te pumau me te tika o te punaha mo te wa roa;
6. Ka tangohia e te punaha nga papaa mapere hei whakapai ake i te pumau katoa o te punaha, a ka ata whiriwhiria nga waahanga miihini katoa hei whakarite i te tika mo te wa roa;
7. Ko te iti rawa o te tukatuka micropore diameter ko te 5μm, ko te mahinga tukatuka katoa ko ± 4μm, ko te tika o te waahanga o te rohe he iti iho i te 3μm, me te whanui tukatuka ko 300 * 300mm;
8. Ka whakamahia mo te miihini miihini tika o nga konganuku, te karamu, te angiangi silicon, te karaehe, te koiora me etahi atu mea, penei i te tukatuka micro-poka me te tapahi tika.
Ka whakatauritea ki te tukatuka micro-hole EDM, te keri miihini, te waikura matū, te pupuhi miihini, me etahi atu, ko nga painga e whai ake nei ko te miihini miihini miihini laser tika:
Te tere tere (tae atu ki te 4000 rua mo ia hekona)
Tino pū (<3μm)
Karekau he here rawa (te whakarewa, te karamu, te angiangi silicon, te waro, me etahi atu)
Tauira kohao ka taea te whakamatataka (te 5μm iti rawa, he kohao taper motuhake)
Ko te tohatoha ka taea te whakarite (tukatuka whanui 300mm * 300mm), kaore he maaka me te kanohi e hiahiatia ana
Karekau he parahanga me nga kai pau
tukatuka tika
| Nga taonga | Tawhā | FM-UVM3A | FM-UVM3B |
| Taiaho | ngaru | 355nm | |
| Mana | ＞3W@40kHz （3-40W hei whiriwhiri） | ||
| auau whakarerekētanga | 1~200kHz | ||
| Te whanui o te puihi | 15ns@40kHz | ||
| kounga kurupae | <1.2 | ||
| Galvo | Te waahi matawai | <50*50mm | ＜15*15mm |
| Te tika o te tukurua | ＜1um | ||
| Te tika o te tuunga | ≤±3um | ||
| XY nga ripanga | Haerenga | 300*300mm (600*600mm te kōwhiringa) | |
| Te whakatau tuunga | 0.1um | ||
| Te tika o te tukurua | ≤±1um | ||
| Te tika o te tuunga | ≤±3um | ||
| Whakaterenga | ≤1G | ||
| Te tere | ≤200mm/s | ||
| Z tuaka | Haerenga | 150mm | |
| Te tika o te tukurua | ≤±3um | ||
| Te tika o te tuunga | ≤±5um | ||
| Te tuunga aroturuki CCD | Kāmera | rima-megapixel | |
| Whakanui whatu | 10X | ||
| rohe splicing | tika | ±3μm | |
| Tukatuka | Te waahi iti | 8um | 5um |
| Te tika o te tukatuka poka | ±5um | ||
| Te tika o te tukurua | ≤±1um | ||
| Nga rauemi e waatea ana mo te tukatuka | Karāhe, organics, konganuku, uku, etc. | ||
| GGGGAtono | Pounamu paipa | ok | pai |
| pounamu mate | ok | pai | |
| Te pounamu kirihou | e kore e pai | ok | |
| Nga peke ngawari | Karekau he waatea | ok | |
| Pūnaha whakamahana | Te whakamatao wai (1500W te kaha whakamatao) | ||
| Tuku hiko | 220V, 50~60HZ, 1 wahanga kua whakaritea ranei | ||
| Mana | ≤2000W | ||
| Ine(mm) | 1200*1200*1900mm | ||
| Taumaha (KG) | 1200Kg | ||
Tuhipoka: Te mahana tonu (25±0.5℃), ka whiwhi i muri i te whakamahana mo te 30 meneti
