Micropore Laser Perforation Machine bakeng sa semiconductor

Bonyane bo boholo ba ts'ebetso ea micropore ke 5μm, ho nepahala ha ts'ebetso ka kakaretso ke ± 4μm, ho nepahala ha likarolo tsa lehae ho ka tlase ho 3μm, 'me bophara ba ts'ebetso ke 300 * 300mm..

Haholo-holo e sebelisetsoang: tlhahiso ea lisebelisoa tsa microelectronic, ho lokisa litempele tsa khatiso, ho lokisoa ha biochip, ho etsa hlobo e nepahetseng, ho etsa likarolo tse nepahetseng tsa lisebelisoa.

1. Ho sebelisa laser ea mahlaseli a matla a matla le a phahameng a tsitsitseng ho senya ka ho toba lisebelisoa tsa gasification, tse nang le sebaka sa μm-level processing aperture le sebaka se amehileng ke mocheso oa μm;

2. Taolo ea lebelo le phahameng le e phahameng ea ho kheloha ha maballo ka li-galvanometers tse nepahetseng tse tsoang linaheng tse ling ho finyella ts'ebetso e potlakileng ea mokhoa o monyenyane oa ho sebetsa hantle;

3. Ho sebetsa ka lebelo le phahameng le ho nepahala ka mokhoa o moholo oa sebopeho sa micro-hole ho lemohuoa ka phetolelo ea sethala sa motlakase se nang le lebelo le phahameng la micron;

4. Z-axis e feto-fetoha ka motlakase ho ikamahanya le lisebelisoa tsa botenya bo fapaneng le ho kopana le litlhoko tse khethehileng tsa ho sebetsana le lesoba la taper;

5. Khamera ea liindasteri ea li-axis super-resolution e sebelisetsoa ho lokisa phoso ea foreimi e feletseng ea galvanometer, ho lebisa tlhokomelo ea ultra-high-precision, le tekanyo ea inthanete ho netefatsa botsitso ba nako e telele le ho nepahala ha tsamaiso;

6. Tsamaiso e amohela li-countertops tsa marble ho ntlafatsa botsitso ba kakaretso ea tsamaiso, 'me likarolo tsohle tsa mechine li khethoa ka hloko ho netefatsa ho nepahala ha nako e telele;

7. Bonyane bo fokolang ba ho sebetsana le micropore bophara ke 5μm, ho nepahala ha kakaretso ea ts'ebetso ke ± 4μm, ho nepahala ha likarolo tsa sebaka seo ho ka tlase ho 3μm, le bophara ba ho sebetsa ke 300 * 300mm;

8. E sebelisoa bakeng sa ho nepahala ha micromachining ea tšepe, li-ceramics, li-wafers tsa silicon, likhalase, li-organics le lisebelisoa tse ling, tse kang ho sebetsa ha micro-hole le ho itšeha ka mokhoa o nepahetseng.

Ha ho bapisoa le ts'ebetso ea likoti tse nyane tsa EDM, ho cheka ka mochini, ho bola ha lik'hemik'hale, ho phunya ka mochini, joalo-joalo, mochini oa laser precision micro-hole o na le melemo e latelang:

Lebelo le phahameng (ho fihla ho likoti tse 4000 motsotsoana)

Ho nepahala ho holimo (<3μm)

Ha ho na lithibelo tsa lintho tse bonahalang (litšepe, ceramics, silicon wafers, organics, joalo-joalo)

Paterone ea lesoba e ka hlophisehang (bonyane 5μm, lesoba le khethehileng la taper)

Phano e ka etsoa ka mokhoa o ikhethileng (ho sebetsa bophara ba 300mm * 300mm), ha ho na hlobo le maske a hlokahalang

Ha ho tšilafalo le ha ho consumables

ts'ebetso e tobileng

Tlhokomeliso: Mocheso o sa khaotseng (25±0.5℃), o fumanoe ka mor'a ho futhumatsa pele ka metsotso e 30