Micropore Laser Perforation Tshuab rau semiconductor

Lus piav qhia luv luv:

Daim ntawv thov: iav, organics, hlau, ceramics, thiab lwm yam.

Qhov tsawg kawg nkaus txoj kab uas hla: 5μm

Qhov tseeb: ± 4μm,

Local feature raug: <3μm

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Qhov tsawg kawg nkaus ua micropore txoj kab uas hla yog 5μm, tag nrho cov kev ua tiav yog ± 4μm, qhov tseeb qhov tseeb hauv zos yog tsawg dua 3μm, thiab qhov dav ntawm kev ua haujlwm yog 300 * 300mm..

Feem ntau siv rau: microelectronic ntaus ntawv manufacturing, luam ntawv template, npaj biochip, precision pwm txoj kev, instrumentation precision qhov chaw manufacturing

1. Siv lub zog siab thiab ruaj khov UV laser ncaj qha rau ablate cov khoom siv gasification, nrog rau μm-theem kev ua haujlwm aperture thiab μm-theem tshav kub cuam tshuam cheeb tsam;

2. High-speed thiab high-precision tswj ntawm beam deflection los ntawm imported precision galvanometers mus cuag high-speed me me-hom precision micro-qhov ua;

3. High-speed thiab high-precision loj-hom micro-qhov ua yog pom tau los ntawm kev txhais lus ntawm micron-theem high-speed linear motor platform;

4. Lub Z-axis yog hluav taws xob hloov kho kom haum rau cov ntaub ntawv sib txawv thicknesses thiab ua tau raws li qhov tshwj xeeb taper qhov kev ua haujlwm;

5. Qhov ntau axis super- daws teeb meem muaj lub koob yees duab yog siv rau tag nrho cov kev ua yuam kev kho ntawm lub galvanometer, ultra-high-precision tsom, thiab kev ntsuas hauv online los xyuas kom meej lub sij hawm ntev stability thiab raug ntawm lub system;

6. Lub kaw lus txais yuav marble countertops los txhim kho lub zuag qhia tag nrho stability ntawm lub system, thiab tag nrho cov neeg kho tshuab Cheebtsam yog ua tib zoo xaiv los xyuas kom meej lub sij hawm ntev;

7. Qhov tsawg kawg nkaus ua micropore txoj kab uas hla yog 5μm, tag nrho cov kev raug yog ± 4μm, lub zos feature raug yog tsawg tshaj li 3μm, thiab cov ua dav yog 300 * 300mm;

8. Nws yog siv rau precision micromachining hlau, ceramics, silicon wafers, iav, organics thiab lwm yam ntaub ntawv, xws li micro-qhov ua thiab precision txiav.

Piv nrog EDM micro-qhov ua, mechanical drilling, tshuaj corrosion, mechanical xuas nrig ntaus, thiab lwm yam., laser precision micro-qhov machining muaj cov hauv qab no zoo:

Kev kub ceev (txog 4000 qhov ib ob)

High precision (<3μm)

Tsis muaj kev txwv cov khoom siv (hlau, ceramics, silicon wafers, organics, thiab lwm yam)

Programmable qhov qauv (tsawg kawg 5μm, tshwj xeeb taper qhov)

Kev faib tawm tuaj yeem kho tau (qhov dav dav 300mm * 300mm), tsis muaj pwm thiab daim npog qhov ncauj

Tsis muaj kuab paug thiab tsis muaj consumables

kev ua haujlwm ncaj qha

Cov khoom	Parameter	FM-UVM3A	FM-UVM3B
Laser	yoj	355nm ua
	Hwj chim	3W @ 40kHz (3-40W yeem)
	modulating zaus	1 ~ 200 kHz
	mem tes dav	15 ns @ 40 kHz
	beam zoo	1.2
Galvo	Tshawb xyuas cheeb tsam	50 * 50 hli	Loj: 15 * 15mm
	Repeatability raug	1 um
	Positioning raug	≤ ± 3 hli
XY tab	Mus ncig	300 * 300mm (600 * 600mm yeem)
	Positioning daws teeb meem	0.1 ua
	Repeatability raug	≤ ± 1 hli
	Positioning raug	≤ ± 3 hli
	Kev nrawm	≤1G
	Ceev	≤200mm / s
Z axis	Mus ncig	150 hli
	Repeatability raug	≤ ± 3 hli
	Positioning raug	≤ ± 5um
CCD saib xyuas qhov chaw	Lub koob yees duab	tsib-megapixel
	Optical magnification	10 X
thaj tsam splicing	qhov tseeb	± 3 hli
Kev ua haujlwm	Yam tsawg kawg nkaus	8 awm	5 ua um
	Qhov kev ua haujlwm raug	± 5 hli
	Repeatability raug	≤ ± 1 hli
	Muaj cov khoom siv rau kev ua haujlwm	iav, organics, hlau, ceramics, thiab lwm yam.
GGGGGApplication	Lub raj mis	ok	zoo
	lub raj mis tuag	ok	zoo
	Lub raj mis yas	tsis zoo	ok
	Hnab mos	Tsis muaj	ok
Coolant system	Dej txias (1500W txias peev)
Fais fab mov	220V, 50 ~ 60HZ, 1 theem lossis customized
Hwj chim	≤ 2000W
Ntsuas (mm)	1200 * 1200 * 1900 hli
Qhov hnyav (KG)	1200 Kg